| File Format | Extensions | Module | Read | Write | SPS | Volume | Curve map |
|---|---|---|---|---|---|---|---|
| Accurion ASCII exported scanning ellipsometry | .txt | accurell | Yes | — | — | — | — |
| Accurex II text data | .txt | accurexii-txt | Yes | — | — | — | — |
| AFM Workshop spectroscopy | .csv | afmw-spec | — | — | Yes | — | — |
| AIST-NT | .aist | aistfile | Yes | — | — | — | — |
| Alicona Imaging AL3D data | .al3d | alicona | Yes | — | — | — | — |
| Ambios AMB | .amb | ambfile | Yes[a] | — | — | — | — |
| Ambios 1D profilometry data | .dat, .xml | ambprofile | Yes | — | — | — | — |
| Analysis Studio XML | .axd, .axz | anasys_xml | Yes | — | Yes | — | — |
| Anfor SIF | .sif | andorsif | Yes[a] | — | — | — | — |
| Anfatec | .par, .int | anfatec | Yes | — | — | — | Yes |
| A.P.E. Research DAX | .dax | apedaxfile | Yes | — | — | — | — |
| A.P.E. Research APDT | .apdt | apedaxfile | Yes | — | — | — | — |
| A.P.E. Research DAT | .dat | apefile | Yes | — | — | — | — |
| Asylum Research ARDF | .ardf | ardf | Yes | — | — | Yes | — |
| Curve map exported to text | .txt | asciicmap | Yes | Yes | — | — | — |
| Text matrix of data values | .txt | asciiexport | — | Yes | — | — | — |
| ASD high-speed AFM files | .asd | asdfile | Yes | — | — | — | — |
| Assing AFM | .afm | assing-afm | Yes | Yes | — | — | — |
| Attocube Systems ASC | .asc | attocube | Yes | — | — | — | — |
| Image Metrology BCR, BCRF | .bcr, .bcrf | bcrfile | Yes | — | — | — | — |
| Burleigh BII | .bii | burleigh_bii | Yes | — | — | — | — |
| Burleigh IMG v2.1 | .img | burleigh | Yes | — | — | — | — |
| Burleigh exported data | .txt, .bin | burleigh_exp | Yes | — | — | — | — |
| Code V interferogram data | .int | codevfile | Yes | — | — | — | — |
| Createc DAT | .dat | createc | Yes | — | — | — | — |
| Benyuan CSM | .csm | csmfile | Yes | — | — | — | — |
| Dektak OPDx profilometry data | .OPDx | dektakvca | Yes | — | — | — | — |
| Dektak XML profilometry data | .xml | dektakxml | Yes | — | — | — | — |
| Veeco Dimension 3100D | .001, .002, etc. | dimensionfile | Yes[a] | — | — | — | — |
| Digital Micrograph DM3 TEM data | .dm3 | dm3file | Yes | — | — | — | — |
| Digital Micrograph DM4 TEM data | .dm4 | dm3file | Yes | — | — | — | — |
| DME Rasterscope | .img | dmefile | Yes | — | — | — | — |
| Gwyddion dumb dump data | .dump | dumbfile | Yes | — | — | — | — |
| ECS | .img | ecsfile | Yes | — | — | — | — |
| Evovis XML profilometry data | .xml | evovisxml | Yes | — | — | — | — |
| Nanosurf EZD, NID | .ezd, .nid | ezdfile | Yes | — | — | — | — |
| FemtoScan SPM | .spm | femtoscan | Yes | — | — | — | — |
| FemtoScan text data | .txt | femtoscan-txt | Yes[b] | — | — | — | — |
| Flexible Image Transport System (FITS) | .fits, .fit | fitsfile | Yes | — | — | — | — |
| VTK structured grid file | .vtk | formats3d | — | Yes | — | — | — |
| PLY 3D Polygon File Format | .ply | formats3d | — | Yes | — | — | — |
| Wavefront OBJ 3D geometry | .obj | formats3d | Yes | Yes | — | — | — |
| Object File Format 3D geometry | .off | formats3d | — | Yes | — | — | — |
| Stereolitography STL 3D geometry (binary) | .stl | formats3d | Yes | Yes | — | — | — |
| XYZ data | .xyz, .dat | formats3d | Yes | Yes | — | — | — |
| DME GDEF | .gdf | gdeffile | Yes | — | — | — | — |
| Gwyddion Simple Field | .gsf | gsffile | Yes | Yes | — | — | — |
| Gwyddion native data | .gwy | gwyfile | Yes | Yes | Yes | Yes | — |
| Gwyddion XYZ data | .gxyzf | gxyzffile | Yes | Yes | — | — | — |
| Psi HDF4 | .hdf | hdf4file | Yes | — | — | — | — |
| Hitachi AFM | .afm | hitachi-afm | Yes | — | — | — | — |
| Hitachi S-3700 and S-4800 SEM data | .txt + image | hitachi-sem | Yes | — | — | — | — |
| WaveMetrics IGOR binary wave v5 | .ibw | igorfile | Yes | Yes | — | — | — |
| WaveMetrics IGOR Packed files | .pxp | igorfile | Yes | — | — | — | — |
| IntelliWave ESD | .esd | intelliwave | Yes | — | — | — | — |
| Intematix SDF | .sdf | intematix | Yes | — | — | — | — |
| ISO 28600:2011 SPM data transfer format | .spm | iso28600 | Yes | Yes | Limited[c] | — | — |
| JEOL | .tif | jeol | Yes | — | — | — | — |
| JEOL TEM image | .tif | jeoltem | Yes[a] | — | — | — | — |
| JPK Instruments | .jpk, .jpk-qi-image, .jpk-force, .jpk-force-map, .jpk-qi-data .map | jpkscan | Yes | — | Yes | — | Yes |
| JEOL JSPM | .tif | jspmfile | Yes | — | — | — | — |
| Keyence profilometry VK3, VK4, VK6, VK7 | .vk3, .vk4, .vk6, .vk7 | keyence | Yes | — | — | — | — |
| Leica LIF Data File | .lif | leica | Yes | — | — | Yes | — |
| Olympus LEXT 4000 | .lext | lextfile | Yes | — | — | — | — |
| FEI Magellan SEM images | .tif | magellan | Yes | — | — | — | — |
| MapVue | .map | mapvue | Yes | — | — | — | — |
| Matlab MAT 5 files | .mat | matfile | Yes | — | — | — | — |
| Zygo MetroPro DAT | .dat | metropro | Yes | — | — | — | — |
| MicroProf TXT | .txt | microprof | Yes | — | — | — | — |
| MicroProf FRT | .frt | microprof | Yes | — | — | — | — |
| DME MIF | .mif | miffile | Yes | — | — | — | — |
| Molecular Imaging MI | .mi | mifile | Yes | — | Limited[c] | — | Yes |
| Aarhus MUL | .mul | mulfile | Yes | — | — | — | — |
| Nanoeducator | .mspm, .stm, .spm | nanoeducator | Yes | — | Yes | — | — |
| Nanomagnetics NMI | .nmi | nanomagnetics | Yes | — | — | — | — |
| Nanonics NAN | .nan | nanonics | Yes | — | — | — | — |
| Nanonis SXM | .sxm | nanonis | Yes | — | — | — | — |
| Nanonis STS spectroscopy | .dat | nanonis-spec | — | — | Yes | — | — |
| Nano-Solution/NanoObserver | .nao | nanoobserver | Yes | — | Yes | — | — |
| Nanoscan XML | .xml | nanoscan | Yes | — | — | — | — |
| NanoScanTech | .nstdat | nanoscantech | Yes | — | Yes | Yes | — |
| Veeco Nanoscope III | .spm, .001, .002, etc. | nanoscope | Yes | — | Limited[c] | Yes | Yes |
| Veeco Nanoscope II | .001, .002, etc. | nanoscope-ii | Yes | — | — | — | — |
| NanoSystem profilometry | .spm | nanosystemz | Yes | — | — | — | — |
| Nanotop SPM | .spm | nanotop | Yes | — | — | — | — |
| GSXM NetCDF | .nc | netcdf | Yes | — | — | — | — |
| Nano Measuring Machine profile data | .dsc + .dat | nmmxyz | Yes[d] | — | — | — | — |
| Nova ASCII | .txt | nova-asc | Yes | — | — | — | — |
| Numpy binary serialised array | .npy | npyfile | Yes | — | — | — | — |
| Multiple numpy binary serialised arrays | .npz | npyfile | Yes | — | — | — | — |
| Nearly raw raster data (NRRD) | .nrrd | nrrdfile | Yes[e] | Yes[f] | — | Yes | — |
| NT-MDT | .mdt | nt-mdt | Yes | — | Yes | Yes | — |
| EM4SYS NX II | .bmp | nxiifile | Yes | — | — | — | — |
| Olympus OIR | .oir | oirfile | Yes | — | — | — | — |
| Olympus packed OIR | .poir | oirfile | Yes | — | — | — | — |
| NT-MDT old MDA | .sxml + .dat | oldmda | — | — | — | Yes | — |
| Olympus LEXT 3000 | .ols | ols | Yes | — | — | — | — |
| Open Microscopy OME TIFF | .ome.tiff, .ome.tif | ometiff | Yes | — | — | — | — |
| Omicron SCALA | .par + .tf*, .tb*, .sf*, .sb* | omicron | Yes | — | Yes | — | — |
| Omicron flat format | .*_flat | omicronflat | Yes | — | — | — | — |
| Omicron MATRIX | .mtrx | omicronmatrix | Yes | — | Limited[c] | Yes | — |
| Wyko OPD | .opd | opdfile | Yes | — | — | — | — |
| Wyko ASCII | .asc | opdfile | Yes | — | — | — | — |
| OpenGPS X3P (ISO 5436-2) | .x3p | opengps | Yes | — | — | — | — |
| NASA Phoenix Mars mission AFM data | .dat, .lbl + .tab | phoenix | Yes | — | — | — | — |
| Pixmap images | .png, .jpeg, .tiff, .tga, .pnm, .bmp | pixmap | Yes[g] | Yes[h] | — | — | — |
| Nanosurf PLT | .plt | pltfile | Yes | — | — | — | — |
| Pacific Nanotechnology PNI | .pni | pnifile | Yes | — | — | — | — |
| Princeton Instruments camera SPE | .spe | princetonspe | Yes | — | — | — | — |
| Park Systems | .tiff, .tif | psia | Yes | — | — | — | — |
| Park Systems PS-PPT | .ps-ppt | psppt | Yes | — | — | — | Yes |
| SymPhoTime TTTR v2.0 data | .pt3 | pt3file | Yes | — | — | — | — |
| Qnami ProteusQ | .dat | qnami | Yes | — | — | — | — |
| Quazar NPIC | .npic | quazarnpic | Yes[a] | — | — | — | — |
| Quesant AFM | .afm | quesant | Yes | — | — | — | — |
| Raw text files | any | rawfile | Yes | — | — | — | — |
| Raw binary files | any | rawfile | Yes | — | — | — | — |
| Graph text data (raw) | any | rawgraph | Yes[i] | — | — | — | — |
| Renishaw WiRE Data File | .wdf | renishaw | Yes | — | Yes | Yes | — |
| RHK Instruments SM3 | .sm3 | rhk-sm3 | Yes | — | Limited[c] | — | — |
| RHK Instruments SM4 | .sm4 | rhk-sm4 | Yes | — | Limited[c] | — | — |
| RHK Instruments SM2 | .sm2 | rhk-spm32 | Yes | — | Limited[c] | — | — |
| RMI TMD 3D measurement | .tmd | rmitmd | Yes | — | — | — | — |
| Automation and Robotics Dual Lens Mapper | .mcr, .mct, .mce | robotics | Yes | — | — | — | — |
| S94 STM files | .s94 | s94file | Yes | — | — | — | — |
| Cyber technologies SCAN data | .scan | scanfile | Yes | — | — | — | — |
| Cyber technologies SCNX data | .scnx | scnxfile | Yes | — | — | — | — |
| Surfstand Surface Data File | .sdf | sdfile | Yes | Yes | — | — | — |
| Micromap SDFA | .sdfa | sdfile | Yes | — | — | — | — |
| Seiko SII | .xqb, .xqd, .xqt, .xqp, .xqj, .xqi | seiko | Yes | — | — | — | — |
| Sensofar PLu | .plu, .apx | sensofar | Yes | — | — | — | — |
| Sensofar PLUx data | .plux | sensofarx | Yes | — | — | — | — |
| Sensolytics DAT | .dat | sensolytics | Yes | — | — | — | Yes |
| Shimadzu | .sph, .spp, .001, .002, etc. | shimadzu | Yes | — | — | — | — |
| Shimadzu ASCII | .txt | shimadzu | Yes | — | — | — | — |
| IonScope SICM | .img | sicmfile | Yes | — | — | — | — |
| Surface Imaging Systems | .sis | sis | Yes | — | — | — | — |
| Thermo Fisher SPC File | .spc | spcfile | — | — | Yes | — | — |
| SPIP ASCII | .asc | spip-asc | Yes | Yes | — | — | — |
| Thermicroscopes SPMLab R4-R7 | .tfr, .ffr, etc. | spmlab | Yes | — | — | — | — |
| Thermicroscopes SPMLab floating point | .flt | spmlabf | Yes | — | — | — | — |
| SPML (Scanning Probe Microscopy Markup Language) | .xml | spml | Yes | — | — | — | — |
| ATC SPMxFormat data | .spm | spmxfile | Yes | — | — | — | — |
| Omicron STMPRG | tp*, ta* | stmprg | Yes | — | — | — | — |
| Molecular Imaging STP | .stp | stpfile | Yes | — | — | — | — |
| Surf | .sur | surffile | Yes | — | — | — | — |
| ThermoFisher Talos TEM images | .tif | talos | Yes | — | — | — | — |
| Tescan MIRA SEM images | .tif | tescan | Yes | — | — | — | — |
| Tescan LYRA SEM images | .hdr + .png | tescan | Yes | — | — | — | — |
| FEI Tecnai imaging and analysis (former Emispec) data | .ser | tiaser | Yes | — | Yes | Yes | — |
| Corning Tropel UltraSort topograhpical data | .ttf | ttffile | Yes | — | — | — | — |
| Corning Tropel exported CSV data | .csv | ttffile | Yes | — | — | — | — |
| Unisoku | .hdr + .dat | unisoku | Yes | — | — | — | — |
| WinSTM data | .stm | win_stm | Yes | — | — | — | — |
| WITec Project data | .wip | wipfile | Yes | — | Yes | Yes | — |
| WITec ASCII export | .dat | witec-asc | Yes | — | — | — | — |
| WITec | .wit | witfile | Yes | — | — | — | — |
| Department of Nanometrology, WRUST | .dat | wrustfile | Yes | — | — | — | — |
| AFM Workshop data | .wsf | wsffile | Yes | — | — | — | — |
| Nanotec WSxM | .tom, .top, .stp | wsxmfile | Yes | Yes | — | — | — |
| Nanotec WSxM curves | .cur | wsxmfile | Yes | — | — | — | — |
| Carl Zeiss SEM scans | .tif | zeiss | Yes | — | — | — | — |
| Carl Zeiss CLSM images | .lsm | zeisslsm | Yes | — | — | Yes | — |
| Zemax grid sag data | .dat | zemax | Yes | — | — | — | — |
| KLA Zeta profilometry data | .zmg | zmgfile | Yes | — | — | — | — |
| Keyence ZON data | .zon | zonfile | Yes | — | — | — | — |
| ZyVector Scanz | .zad | zyvex | Yes | — | — | — | — |
| OpenEXR images | .exr | hdrimage | Yes | Yes | — | — | — |
| Zygo DATX HDF5 | .datx | datxfile | Yes | — | — | — | — |
| EPFL HDF5 | .h5 | epflfile | Yes | — | — | — | — |
| Asylum Research Ergo HDF5 | .h5,.aris | ergofile | Yes | — | — | — | — |
| FusionScope HDF5 experiment files | .fsexp | fusionscope | Yes | — | — | — | — |
| GXSM4 HDF5 | .nc | gxsm4 | Yes | — | — | — | — |
| Generic HDF5 files | .h5 | hdf5file | Yes | — | — | — | — |
| Matlab MAT 7.x files | .mat | hdf5file | Yes | — | — | — | — |
| Nanosurf NHF | .nhf | nhffile | Yes | — | — | — | — |
| N-Dimensional Spectroscopy and Imaging Data (NSID) HDF5 | .h5 | nsidfile | Yes | — | — | — | — |
| Shilps Sciences Lucent HDF5 | .h5 | shilpsfile | Yes | — | Yes | Yes | Yes |
| ThermoFisher Velox EMD TEM HDF5 | .emd | veloxemd | Yes | — | — | — | — |
[a] The import module is unfinished due to the lack of documentation, testing files and/or people willing to help with the testing. If you can help please contact us. [b] Regular sampling in both X and Y direction is assumed. [c] Spectra curves are imported as graphs, positional information is lost. [d] XYZ data are interpolated to a regular grid upon import. [e] Not all variants are implemented. [f] Data are exported in a fixed attached native-endian float point format. [g] Import support relies on Gdk-Pixbuf and hence may vary among systems. [h] Usually lossy, intended for presentational purposes. 16bit grayscale export is possible to PNG, TIFF and PNM. [i] At present, only simple two-column data, imported as graph curves, are supported. | |||||||