| File Format | Extensions | Module | Read | Write | SPS | Volume |
|---|---|---|---|---|---|---|
| Accurex II text data | .txt | accurexii-txt | Yes | — | — | — |
| AIST-NT | .aist | aistfile | Yes | — | — | — |
| Alicona Imaging AL3D data | .al3d | alicona | Yes | — | — | — |
| Ambios AMB | .amb | ambfile | Yes[a] | — | — | — |
| Anfatec | .par, .int | anfatec | Yes | — | — | — |
| A.P.E. Research DAX | .dax | apedaxfile | Yes | — | — | — |
| A.P.E. Research APDT | .apdt | apedaxfile | Yes | — | — | — |
| A.P.E. Research DAT | .dat | apefile | Yes | — | — | — |
| Text matrix of data values | .txt | asciiexport | — | Yes | — | — |
| Assing AFM | .afm | assing-afm | Yes | Yes | — | — |
| Attocube Systems ASC | .asc | attocube | Yes | — | — | — |
| Image Metrology BCR, BCRF | .bcr, .bcrf | bcrfile | Yes | — | — | — |
| Burleigh BII | .bii | burleigh_bii | Yes | — | — | — |
| Burleigh IMG v2.1 | .img | burleigh | Yes | — | — | — |
| Burleigh exported data | .txt, .bin | burleigh_exp | Yes | — | — | — |
| Code V interferogram data | .int | codevfile | Yes | — | — | — |
| Createc DAT | .dat | createc | Yes | — | — | — |
| Benyuan CSM | .csm | csmfile | Yes | — | — | — |
| Dektak OPDx profilometry data | .OPDx | dektakvca | Yes | — | — | — |
| Dektak XML profilometry data | .xml | dektakxml | Yes | — | — | — |
| Veeco Dimension 3100D | .001, 002, etc. | dimensionfile | Yes[a] | — | — | — |
| Digital Micrograph DM3 TEM data | .dm3 | dm3file | Yes | — | — | — |
| Digital Micrograph DM4 TEM data | .dm4 | dm3file | Yes | — | — | — |
| DME Rasterscope | .img | dmefile | Yes | — | — | — |
| Gwyddion dumb dump data | .dump | dumbfile | Yes | — | — | — |
| ECS | .img | ecsfile | Yes | — | — | — |
| Nanosurf EZD, NID | .ezd, .nid | ezdfile | Yes | — | — | — |
| FemtoScan SPM | ,spm. | femtoscan | Yes | — | — | — |
| FemtoScan text data | .txt | femtoscan-txt | Yes[b] | — | — | — |
| Flexible Image Transport System (FITS) | .fits, .fit | fitsfile | Yes | — | — | — |
| DME GDEF | .gdf | gdeffile | Yes | — | — | — |
| Gwyddion Simple Field | .gsf | gsffile | Yes | Yes | — | — |
| Gwyddion native data | .gwy | gwyfile | Yes | Yes | Yes | Yes |
| Gwyddion XYZ data | .gxyzf | gxyzffile | Yes | Yes | — | — |
| Psi HDF4 | .hdf | hdf4file | Yes | — | — | — |
| Hitachi AFM | .afm | hitachi-afm | Yes | — | — | — |
| Hitachi S-3700 and S-4800 SEM data | .txt, +, image | hitachi-sem | Yes | — | — | — |
| WaveMetrics IGOR binary wave v5 | .ibw | igorfile | Yes | — | — | — |
| IntelliWave ESD | .esd | intelliwave | Yes | — | — | — |
| Intematix SDF | .sdf | intematix | Yes | — | — | — |
| ISO 28600:2011 SPM data transfer format | .spm | iso28600 | Yes | Yes | Limited[c] | — |
| JEOL | .tif | jeol | Yes | — | — | — |
| JPK Instruments | .jpk, .jpk-qi-image, .jpk-force, .jpk-force-map, .jpk-qi-data | jpkscan | Yes | — | Yes | Yes |
| JEOL JSPM | .tif | jspmfile | Yes | — | — | — |
| Keyence profilometry VK4 | .vk4 | keyence | Yes | — | — | — |
| Leica LIF Data File | .lif | leica | Yes | — | — | Yes |
| Olympus LEXT 4000 | .lext | lextfile | Yes | — | — | — |
| FEI Magellan SEM images | .tif | magellan | Yes | — | — | — |
| MapVue | .map | mapvue | Yes | — | — | — |
| Zygo MetroPro DAT | .dat | metropro | Yes | — | — | — |
| MicroProf TXT | .txt | microprof | Yes | — | — | — |
| MicroProf FRT | .frt | microprof | Yes | — | — | — |
| DME MIF | .mif | miffile | Yes | — | — | — |
| Molecular Imaging MI | .mi | mifile | Yes | — | Limited[c] | — |
| Aarhus MUL | .mul | mulfile | Yes | — | — | — |
| Nanoeducator | .mspm, .stm, .spm | nanoeducator | Yes | — | Yes | — |
| Nanomagnetics NMI | .nmi | nanomagnetics | Yes | — | — | — |
| Nanonics NAN | .nan | nanonics | Yes | — | — | — |
| Nanonis SXM | .sxm | nanonis | Yes | — | — | — |
| Nano-Solution/NanoObserver | .nao | nanoobserver | Yes | — | Yes | — |
| Nanoscan XML | .xml | nanoscan | Yes | — | — | — |
| NanoScanTech | .nstdat | nanoscantech | Yes | — | Yes | Yes |
| Veeco Nanoscope III | .001, .002, etc. | nanoscope | Yes | — | Limited[c] | Yes |
| Veeco Nanoscope II | .001, .002, etc. | nanoscope-ii | Yes | — | — | — |
| Nanotop SPM | .spm | nanotop | Yes | — | — | — |
| GSXM NetCDF | .nc | netcdf | Yes | — | — | — |
| Nano Measuring Machine profile data | .dsc, .dat | nmmxyz | Yes[d] | — | — | — |
| Nearly raw raster data (NRRD) | .nrrd | nrrdfile | Yes[e] | Yes[f] | — | Yes |
| NT-MDT | .mdt | nt-mdt | Yes | — | Yes | Yes |
| EM4SYS NX II | .bmp | nxiifile | Yes | — | — | — |
| NT-MDT old MDA | .sxml, .dat | oldmda | — | — | — | Yes |
| Olympus LEXT 3000 | .ols | ols | Yes | — | — | — |
| Open Microscopy OME TIFF | .ome.tiff, .ome.tif | ometiff | Yes | — | — | — |
| Omicron SCALA | .par, .tf*, .tb*, .sf*, .sb* | omicron | Yes | — | Yes | — |
| Omicron flat format | .*_flat | omicronflat | Yes | — | — | — |
| Omicron MATRIX | .mtrx | omicronmatrix | Yes | — | — | — |
| Wyko OPD | .opd | opdfile | Yes | — | — | — |
| Wyko ASCII | .asc | opdfile | Yes | — | — | — |
| OpenGPS X3P (ISO 5436-2) | .x3p | opengps | Yes | — | — | — |
| Pixmap images | .png, .jpeg, .tiff, .tga, .pnm, .bmp | pixmap | Yes[g] | Yes[h] | — | — |
| Nanosurf PLT | .plt | pltfile | Yes | — | — | — |
| Pacific Nanotechnology PNI | .pni | pnifile | Yes | — | — | — |
| Princeton Instruments camera SPE | .spe | princetonspe | Yes | — | — | — |
| Park Systems | .tiff, .tif | psia | Yes | — | — | — |
| SymPhoTime TTTR v2.0 data | .pt3 | pt3file | Yes | — | — | — |
| Quesant AFM | .afm | quesant | Yes | — | — | — |
| Raw text files | any | rawfile | Yes | — | — | — |
| Raw binary files | any | rawfile | Yes | — | — | — |
| Graph text data (raw) | any | rawgraph | Yes[i] | — | — | — |
| XYZ data | .xyz, .dat | rawxyz | Yes | Yes | — | — |
| Renishaw WiRE Data File | .wdf | renishaw | Yes | — | Yes | Yes |
| RHK Instruments SM3 | .sm3 | rhk-sm3 | Yes | — | Limited[c] | — |
| RHK Instruments SM4 | .sm4 | rhk-sm4 | Yes | — | Limited[c] | — |
| RHK Instruments SM2 | .sm2 | rhk-spm32 | Yes | — | Limited[c] | — |
| Automation and Robotics Dual Lens Mapper | .mcr, .mct, .mce | robotics | Yes | — | — | — |
| S94 STM files | .s94 | s94file | Yes | — | — | — |
| Surfstand Surface Data File | .sdf | sdfile | Yes | Yes | — | — |
| Micromap SDFA | .sdfa | sdfile | Yes | — | — | — |
| Seiko SII | .xqb, .xqd, .xqt, .xqp, .xqj, .xqi | seiko | Yes | — | — | — |
| Sensofar PLu v2000 | .plu | sensofar | Yes | — | — | — |
| Sensofar PLUx data | .plux | sensofarx | Yes | — | — | — |
| Sensolytics DAT | .dat | sensolytics | Yes | — | — | — |
| Shimadzu | .sph, .spp, .001, .002, etc. | shimadzu | Yes | — | — | — |
| Shimadzu ASCII | .txt | shimadzu | Yes | — | — | — |
| IonScope SICM | .img | sicmfile | Yes | — | — | — |
| Surface Imaging Systems | .sis | sis | Yes | — | — | — |
| SPIP ASCII | .asc | spip-asc | Yes | Yes | — | — |
| Thermicroscopes SPMLab R4-R7 | .tfr, .ffr, etc. | spmlab | Yes | — | — | — |
| Thermicroscopes SPMLab floating point | .flt | spmlabf | Yes | — | — | — |
| SPML (Scanning Probe Microscopy Markup Language) | .xml | spml | Yes | — | — | — |
| ATC SPMxFormat data | .spm | spmxfile | Yes | — | — | — |
| Omicron STMPRG | tp*, ta* | stmprg | Yes | — | — | — |
| Molecular Imaging STP | .stp | stpfile | Yes | — | — | — |
| Surf | .sur | surffile | Yes | — | — | — |
| Tescan MIRA SEM images | .tif | tescan | Yes | — | — | — |
| FEI Tecnai imaging and analysis (former Emispec) data | .ser | tiaser | Yes | — | Yes | Yes |
| Unisoku | .hdr, .dat | unisoku | Yes | — | — | — |
| VTK structured grid file | .vtk | vtkfile | — | Yes | — | — |
| WinSTM data | .stm | win_stm | Yes | — | — | — |
| WITec Project data | .wip | wipfile | Yes | — | Yes | Yes |
| WITec ASCII export | .dat | witec-asc | Yes | — | — | — |
| WITec | .wit | witfile | Yes | — | — | — |
| WSF ASCII data | .wsf | wsffile | Yes | — | — | — |
| Nanotec WSxM | .tom, .stp | wsxmfile | Yes | Yes | — | — |
| Carl Zeiss SEM scans | .tif | zeiss | Yes | — | — | — |
| Carl Zeiss CLSM images | .lsm | zeisslsm | Yes | — | — | Yes |
| Zemax grid sag data | .dat | zemax | Yes | — | — | — |
| OpenEXR images | .exr | hdrimage | Yes | Yes | — | — |
[a] The import module is unfinished due to the lack of documentation, testing files and/or people willing to help with the testing. If you can help please contact us. [b] Regular sampling in both X and Y direction is assumed. [c] Spectra curves are imported as graphs, positional information is lost. [d] XYZ data are interpolated to a regular grid upon import. [e] Not all variants are implemented. [f] Data are exported in a fixed attached native-endian float point format. [g] Import support relies on Gdk-Pixbuf and hence may vary among systems. [h] Usually lossy, intended for presentational purposes. 16bit grayscale export is possible to PNG, TIFF and PNM. [i] At present, only simple two-column data, imported as graph curves, are supported. | ||||||