Supported File Formats

File FormatExtensionsModuleReadWriteSPSVolume
Accurex II text data.txtaccurexii-txtYes
AIST-NT.aistaistfileYes
Alicona Imaging AL3D data.al3daliconaYes
Ambios AMB.ambambfileYes
Anfatec.par, .intanfatecYes
A.P.E. Research DAX.daxapedaxfileYes
A.P.E. Research DAT.datapefileYes
Text matrix of data values.txtasciiexportYes
Assing AFM.afmassing-afmYesYes
Attocube Systems ASC.ascattocubeYes
Image Metrology BCR, BCRF.bcr, .bcrfbcrfileYes
Burleigh BII.biiburleigh_biiYes
Burleigh IMG v2.1.imgburleighYes
Burleigh exported data.txt, .binburleigh_expYes
Code V interferogram data.intcodevfileYes
Createc DAT.datcreatecYes
Benyuan CSM.csmcsmfileYes
Digital Micrograph DM3 TEM data.dm3dm3fileYes
DME Rasterscope.imgdmefileYes
Gwyddion dumb dump data.dumpdumbfileYes
ECS.imgecsfileYes
Nanosurf EZD, NID.ezd, .nidezdfileYes
FemtoScan SPM,spm.femtoscanYes
FemtoScan text data.txtfemtoscan-txtYes[a]
Flexible Image Transport System (FITS).fits,, .fitfitsfileYes
DME GDEF.gdfgdeffileYes
Gwyddion Simple Field.gsfgsffileYesYes
Gwyddion native data.gwygwyfileYesYesYesYes
Gwyddion XYZ data.gxyzfgxyzffileYes[b]Yes
Psi HDF4.hdfhdf4fileYes
Hitachi AFM.afmhitachi-afmYes
Hitachi S-3700 and S-4800 SEM data.txt, +, imagehitachi-semYes
WaveMetrics IGOR binary wave v5.ibwigorfileYes
Intematix SDF.sdfintematixYes
ISO 28600:2011 SPM data transfer format.spmiso28600YesYesLimited[c]
JEOL.tifjeolYes
JPK Instruments.jpkjpkscanYes
JEOL JSPM.tifjspmfileYes
Olympus LEXT 4000.lextlextfileYes
FEI Magellan SEM images.tifmagellanYes
MapVue.mapmapvueYes
Zygo MetroPro DAT.datmetroproYes
MicroProf TXT.txtmicroprofYes
MicroProf FRT.frtmicroprofYes
DME MIF.mifmiffileYes
Molecular Imaging MI.mimifileYesLimited[c]
Aarhus MUL.mulmulfileYes
Nanoeducator.mspm, .stm, .spmnanoeducatorYesYes
Nanomagnetics NMI.nminanomagneticsYes
Nanonics NAN.nannanonicsYes
Nanonis SXM.sxmnanonisYes
NanoObserver.naonanoobserverYes
Nanoscan XML.xmlnanoscanYes
NanoScanTech.nstdatnanoscantechYesYesYes
Veeco Nanoscope III.001, .002, etc.nanoscopeYesLimited[c]Yes
Veeco Nanoscope II.001, .002, etc.nanoscope-iiYes
Nanotop SPM.spmnanotopYes
GSXM NetCDF.ncnetcdfYes
Nearly raw raster data (NRRD).nrrdnrrdfileYes[d]Yes[e]
NT-MDT.mdtnt-mdtYesYesYes
EM4SYS NX II.bmpnxiifileYes
NT-MDT old MDA.sxml, .datoldmdaYes
Olympus LEXT 3000.olsolsYes
Open Microscopy OME TIFF.ome.tiff,, .ome.tifometiffYes
Omicron SCALA.par, .tf*, .tb*, .sf*, .sb*omicronYesYes
Omicron flat format.*_flatomicronflatYes
Omicron MATRIX.mtrxomicronmatrixYes
Wyko OPD.opdopdfileYes
Wyko ASCII.ascopdfileYes
OpenGPS X3P (ISO 5436-2).x3popengpsYes
Pixmap images.png, .jpeg, .tiff, .tga, .pnm, .bmppixmapYes[f]Yes[g]
Nanosurf PLT.pltpltfileYes
Pacific Nanotechnology PNI.pnipnifileYes
Park Systems.tiff,, .tifpsiaYes
SymPhoTime TTTR v2.0 data.pt3pt3fileYes
Quesant AFM.afmquesantYes
Raw text filesanyrawfileYes
Raw binary filesanyrawfileYes
Graph text data (raw)anyrawgraphYes[h]
XYZ data.xyz, .datrawxyzYes[b]
Renishaw WiRE Data File.wdfrenishawYesYesYes
RHK Instruments SM3.sm3rhk-sm3YesLimited[c]
RHK Instruments SM4.sm4rhk-sm4YesLimited[c]
RHK Instruments SM2.sm2rhk-spm32YesLimited[c]
Automation and Robotics Dual Lens Mapper.mcr, .mct, .mceroboticsYes
S94 STM files.s94s94fileYes
Surfstand Surface Data File.sdfsdfileYesYes
Micromap SDFA.sdfasdfileYes
Seiko SII.xqb, .xqd, .xqt, .xqp, .xqj, .xqiseikoYes
Sensofar PLu v2000.plusensofarYes
Sensolytics DAT.datsensolyticsYes
Shimadzu.sph, .spp, .001, .002, etc.shimadzuYes
Shimadzu ASCII.txtshimadzuYes
IonScope SICM.imgsicmfileYes
Surface Imaging Systems.sissisYes
SPIP ASCII.ascspip-ascYes
Thermicroscopes SPMLab R4-R7.tfr, .ffr, etc.spmlabYes
Thermicroscopes SPMLab floating point.fltspmlabfYes
SPML (Scanning Probe Microscopy Markup Language).xmlspmlYes
ATC SPMxFormat data.spmspmxfileYes
Omicron STMPRGtp*, ta*stmprgYes
Molecular Imaging STP.stpstpfileYes
Surf.sursurffileYes
Tescan MIRA SEM images.tiftescanYes
FEI Tecnai imaging and analysis (former Emispec) data.sertiaserYesYesYes
Unisoku.hdr, .datunisokuYes
VTK structured grid file.vtkvtkfileYes
WinSTM data.stmwin_stmYes
WITec Project data.wipwipfileYesYesYes
WITec ASCII export.datwitec-ascYes
WITec.witwitfileYes
WSF ASCII data.wsfwsffileYes
Nanotec WSxM.tom,, .stpwsxmfileYes
Carl Zeiss SEM scans.tifzeissYes
Zemax grid sag data.datzemaxYes
OpenEXR images.exrhdrimage.ccYesYes

[a] Regular sampling in both X and Y direction is assumed.

[b] XYZ data are interpolated to a regular grid upon import.

[c] Spectra curves are imported as graphs, positional information is lost.

[d] Not all variants are implemented.

[e] Data are exported in a fixed attached native-endian float point format.

[f] Import support relies on Gdk-Pixbuf and hence may vary among systems.

[g] Usually lossy, intended for presentational purposes. 16bit grayscale export is possible to PNG, TIFF and PNM.

[h] At present, only simple two-column data, imported as graph curves, are supported.