Supported File Formats

File FormatExtensionsModuleReadWriteSPSVolume
Accurex II text data.txtaccurexii-txtYes
Alicona Imaging AL3D data.al3daliconaYes
Ambios AMB.ambambfileYes[a]
Anfatec.par, .intanfatecYes
A.P.E. Research DAX.daxapedaxfileYes
A.P.E. Research APDT.apdtapedaxfileYes
A.P.E. Research DAT.datapefileYes
Text matrix of data values.txtasciiexportYes
Assing AFM.afmassing-afmYesYes
Attocube Systems ASC.ascattocubeYes
Image Metrology BCR, BCRF.bcr, .bcrfbcrfileYes
Burleigh BII.biiburleigh_biiYes
Burleigh IMG v2.1.imgburleighYes
Burleigh exported data.txt, .binburleigh_expYes
Code V interferogram data.intcodevfileYes
Createc DAT.datcreatecYes
Benyuan CSM.csmcsmfileYes
Dektak XML profilometry data.xmldektakxmlYes
Veeco Dimension 3100D.001, 002, etc.dimensionfileYes[a]
Digital Micrograph DM3 TEM data.dm3dm3fileYes
Digital Micrograph DM4 TEM data.dm4dm3fileYes
DME Rasterscope.imgdmefileYes
Gwyddion dumb dump data.dumpdumbfileYes
Nanosurf EZD, NID.ezd, .nidezdfileYes
FemtoScan SPM,spm.femtoscanYes
FemtoScan text data.txtfemtoscan-txtYes[b]
Flexible Image Transport System (FITS).fits, .fitfitsfileYes
DME GDEF.gdfgdeffileYes
Gwyddion Simple Field.gsfgsffileYesYes
Gwyddion native data.gwygwyfileYesYesYesYes
Gwyddion XYZ data.gxyzfgxyzffileYesYes
Psi HDF4.hdfhdf4fileYes
Hitachi AFM.afmhitachi-afmYes
Hitachi S-3700 and S-4800 SEM data.txt, +, imagehitachi-semYes
WaveMetrics IGOR binary wave v5.ibwigorfileYes
IntelliWave ESD.esdintelliwaveYes
Intematix SDF.sdfintematixYes
ISO 28600:2011 SPM data transfer format.spmiso28600YesYesLimited[c]
JPK Instruments.jpk, .jpk-qi-imagejpkscanYesYes
JEOL JSPM.tifjspmfileYes
Keyence profilometry VK4.vk4keyenceYes
Leica LIF Data File.lifleicaYesYes
Olympus LEXT 4000.lextlextfileYes
FEI Magellan SEM images.tifmagellanYes
Zygo MetroPro DAT.datmetroproYes
MicroProf TXT.txtmicroprofYes
MicroProf FRT.frtmicroprofYes
DME MIF.mifmiffileYes
Molecular Imaging MI.mimifileYesLimited[c]
Aarhus MUL.mulmulfileYes
Nanoeducator.mspm, .stm, .spmnanoeducatorYesYes
Nanomagnetics NMI.nminanomagneticsYes
Nanonics NAN.nannanonicsYes
Nanonis SXM.sxmnanonisYes
Nanoscan XML.xmlnanoscanYes
Veeco Nanoscope III.001, .002, etc.nanoscopeYesLimited[c]Yes
Veeco Nanoscope II.001, .002, etc.nanoscope-iiYes
Nanotop SPM.spmnanotopYes
GSXM NetCDF.ncnetcdfYes
Nano Measuring Machine profile data.dsc, .datnmmxyzYes[d]
Nearly raw raster data (NRRD).nrrdnrrdfileYes[e]Yes[f]Yes
EM4SYS NX II.bmpnxiifileYes
NT-MDT old MDA.sxml, .datoldmdaYes
Olympus LEXT 3000.olsolsYes
Open Microscopy OME TIFF.ome.tiff, .ome.tifometiffYes
Omicron SCALA.par, .tf*, .tb*, .sf*, .sb*omicronYesYes
Omicron flat format.*_flatomicronflatYes
Omicron MATRIX.mtrxomicronmatrixYes
Wyko OPD.opdopdfileYes
Wyko ASCII.ascopdfileYes
OpenGPS X3P (ISO 5436-2).x3popengpsYes
Pixmap images.png, .jpeg, .tiff, .tga, .pnm, .bmppixmapYes[g]Yes[h]
Nanosurf PLT.pltpltfileYes
Pacific Nanotechnology PNI.pnipnifileYes
Princeton Instruments camera SPE.speprincetonspeYes
Park Systems.tiff, .tifpsiaYes
SymPhoTime TTTR v2.0 data.pt3pt3fileYes
Quesant AFM.afmquesantYes
Raw text filesanyrawfileYes
Raw binary filesanyrawfileYes
Graph text data (raw)anyrawgraphYes[i]
XYZ, .datrawxyzYesYes
Renishaw WiRE Data File.wdfrenishawYesYesYes
RHK Instruments SM3.sm3rhk-sm3YesLimited[c]
RHK Instruments SM4.sm4rhk-sm4YesLimited[c]
RHK Instruments SM2.sm2rhk-spm32YesLimited[c]
Automation and Robotics Dual Lens Mapper.mcr, .mct, .mceroboticsYes
S94 STM files.s94s94fileYes
Surfstand Surface Data File.sdfsdfileYesYes
Micromap SDFA.sdfasdfileYes
Seiko SII.xqb, .xqd, .xqt, .xqp, .xqj, .xqiseikoYes
Sensofar PLu v2000.plusensofarYes
Sensofar PLUx data.pluxsensofarxYes
Sensolytics DAT.datsensolyticsYes
Shimadzu.sph, .spp, .001, .002, etc.shimadzuYes
Shimadzu ASCII.txtshimadzuYes
IonScope SICM.imgsicmfileYes
Surface Imaging Systems.sissisYes
SPIP ASCII.ascspip-ascYesYes
Thermicroscopes SPMLab R4-R7.tfr, .ffr, etc.spmlabYes
Thermicroscopes SPMLab floating point.fltspmlabfYes
SPML (Scanning Probe Microscopy Markup Language).xmlspmlYes
ATC SPMxFormat data.spmspmxfileYes
Omicron STMPRGtp*, ta*stmprgYes
Molecular Imaging STP.stpstpfileYes
Tescan MIRA SEM images.tiftescanYes
FEI Tecnai imaging and analysis (former Emispec) data.sertiaserYesYesYes
Unisoku.hdr, .datunisokuYes
VTK structured grid file.vtkvtkfileYes
WinSTM data.stmwin_stmYes
WITec Project data.wipwipfileYesYesYes
WITec ASCII export.datwitec-ascYes
WSF ASCII data.wsfwsffileYes
Nanotec WSxM.tom, .stpwsxmfileYesYes
Carl Zeiss SEM scans.tifzeissYes
Zemax grid sag data.datzemaxYes
OpenEXR images.exrhdrimageYesYes

[a] The import module is unfinished due to the lack of documentation, testing files and/or people willing to help with the testing. If you can help please contact us.

[b] Regular sampling in both X and Y direction is assumed.

[c] Spectra curves are imported as graphs, positional information is lost.

[d] XYZ data are interpolated to a regular grid upon import.

[e] Not all variants are implemented.

[f] Data are exported in a fixed attached native-endian float point format.

[g] Import support relies on Gdk-Pixbuf and hence may vary among systems.

[h] Usually lossy, intended for presentational purposes. 16bit grayscale export is possible to PNG, TIFF and PNM.

[i] At present, only simple two-column data, imported as graph curves, are supported.